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Characterization and integration in Cu damascene structures of AURORA, an inorganic low-k dielectric
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2012 since deposited on 2021-10-14
1last month
Acq. date: 2025-12-07
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Metrics
Views
2012 since deposited on 2021-10-14
1last month
Acq. date: 2025-12-07
Citations