Browsing by Author "Sorsch, T.W."
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Publication Initial growth kinetics of ALD Al2O3 and HfO2 and post-annealing effects
;Wilk, G.D. ;Frank, M. ;Ho, M.Y. ;Green, Martin ;Chabal, Y.J. ;Raisanen, P. ;Brijs, BertSorsch, T.W.Oral presentation2002, Atomic Layer Deposition Conference - ALD