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Browsing by Author "Sorsch, T.W."

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    Initial growth kinetics of ALD Al2O3 and HfO2 and post-annealing effects

    Wilk, G.D.
    ;
    Frank, M.
    ;
    Ho, M.Y.
    ;
    Green, Martin
    ;
    Chabal, Y.J.
    ;
    Raisanen, P.
    ;
    Brijs, Bert
    ;
    Sorsch, T.W.
    Oral presentation
    2002, Atomic Layer Deposition Conference - ALD

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