Initial growth kinetics of ALD Al2O3 and HfO2 and post-annealing effects

Simple item page Full metadata Statistics

Author(s)

Wilk, G.D.

;

Frank, M.

;

Ho, M.Y.

;

Green, Martin

;

Chabal, Y.J.

;

Raisanen, P.

;

Brijs, Bert

;

Sorsch, T.W.

Metrics

1982 since deposited on 2021-10-15

Acq. date: 2025-12-09