Publication:
Initial growth kinetics of ALD Al2O3 and HfO2 and post-annealing effects
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1983 since deposited on 2021-10-15
1last month
Acq. date: 2026-04-06
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Statistics
Views
1983 since deposited on 2021-10-15
1last month
Acq. date: 2026-04-06
Citations