Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Soussou, A."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Process Optimization of MP18 Semi-Damascene Interconnects with Fully Self-Aligned Vias at Sub-2nm Nodes

    Soussou, A.
    ;
    Marti, Giulio  
    ;
    Tokei, Zsolt  
    ;
    Park, Seongho  
    ;
    Vincent, B.
    Proceedings paper
    2024, Conference on Advanced Etch Technology and Process Integration for Nanopatterning XIII, FEB 26-29, 2024, p.Art. 1295807

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings