Publication:
Process Optimization of MP18 Semi-Damascene Interconnects with Fully Self-Aligned Vias at Sub-2nm Nodes
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97 since deposited on 2024-06-06
2last month
Acq. date: 2026-02-25
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Statistics
Views
97 since deposited on 2024-06-06
2last month
Acq. date: 2026-02-25
Citations