Publication:
Process Optimization of MP18 Semi-Damascene Interconnects with Fully Self-Aligned Vias at Sub-2nm Nodes
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99 since deposited on 2024-06-06
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Acq. date: 2026-04-06
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99 since deposited on 2024-06-06
2last month
1last week
Acq. date: 2026-04-06
Citations