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Browsing by Author "Spear, Jennifer"

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    SiCP selective epitaxial growth in recessed source/drain regions yielding to drive current enhancement in n-channel MOSFET

    Bauer, Matthias
    ;
    Machkaoutsan, Vladimir  
    ;
    Zhang, Y.
    ;
    Weeks, Doran
    ;
    Spear, Jennifer
    ;
    Thomas, Shawn
    Proceedings paper
    2008, SiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices, 12/10/2008, p.1001-1013

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