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Browsing by Author "Sporken, R."

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    XPS study of ion induced oxidation of silicon with and without oxygen flooding

    De Witte, Hilde
    ;
    Conard, Thierry  
    ;
    Sporken, R.
    ;
    Gouttebaron, R.
    ;
    Magnée, R.
    ;
    Vandervorst, Wilfried  
    Proceedings paper
    2000, Secondary Ion Mass Spectrometry - SIMS XII. Proceedings of the 12th International Conference, 5/09/1999, p.73-76

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