Browsing by Author "Steenwelle, R."
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Publication Characterization of epitaxial Pb(Zr,Ti)O3 thin films deposited by pulsed laser deposition on silicon cantilevers
;Nguyen, M.D. ;Nazeer, H. ;Karakaya, Koray ;Pham, S.V. ;Steenwelle, R. ;Dekkers, M.Abelmann, L.Journal article2010, Journal of Micromechanics and Microengineering, (20) 8, p.85022