Characterization of epitaxial Pb(Zr,Ti)O3 thin films deposited by pulsed laser deposition on silicon cantilevers

Author(s)

Nguyen, M.D.

;

Nazeer, H.

;

Karakaya, Koray

;

Pham, S.V.

;

Steenwelle, R.

;

Dekkers, M.

;

Abelmann, L.

;

Blank, M.

;

Rijnders, G.

Journal of Micromechanics and Microengineering

1874 since deposited on 2021-10-18

Acq. date: 2025-10-26