Publication:
Characterization of epitaxial Pb(Zr,Ti)O3 thin films deposited by pulsed laser deposition on silicon cantilevers
Date
| dc.contributor.author | Nguyen, M.D. | |
| dc.contributor.author | Nazeer, H. | |
| dc.contributor.author | Karakaya, Koray | |
| dc.contributor.author | Pham, S.V. | |
| dc.contributor.author | Steenwelle, R. | |
| dc.contributor.author | Dekkers, M. | |
| dc.contributor.author | Abelmann, L. | |
| dc.contributor.author | Blank, M. | |
| dc.contributor.author | Rijnders, G. | |
| dc.date.accessioned | 2021-10-18T19:33:30Z | |
| dc.date.available | 2021-10-18T19:33:30Z | |
| dc.date.issued | 2010 | |
| dc.identifier.issn | 0960-1317 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17692 | |
| dc.source.beginpage | 85022 | |
| dc.source.issue | 8 | |
| dc.source.journal | Journal of Micromechanics and Microengineering | |
| dc.source.volume | 20 | |
| dc.title | Characterization of epitaxial Pb(Zr,Ti)O3 thin films deposited by pulsed laser deposition on silicon cantilevers | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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