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Browsing by Author "Stevens, Rudi"

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    Influence of the antireflection coating on the electromigration resistance of 0.5 µm technology metal-2 line structures

    Stevens, Rudi
    ;
    Witvrouw, Ann
    ;
    Roussel, Philippe  
    ;
    Maex, Karen  
    ;
    Meynen, Herman
    ;
    Cuthbertson, Alan
    Journal article
    1995, Appl. Surf. Sci., 91, p.208-214

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