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Browsing by Author "Stirniman, J. P."

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    Characterization and correction of optical proximity effects in deep-ultraviolet lithography using behavior modeling

    Yen, Anthony
    ;
    Tritchkov, Alexander
    ;
    Stirniman, J. P.
    ;
    Vandenberghe, Geert  
    ;
    Jonckheere, Rik  
    Journal article
    1996, Journal of Vacuum Science and Technology B, (14) 6, p.4175-4178

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