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Browsing by Author "Stirnimann, J."

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    0.18 μm KrF lithography using optical proximity correction based on empirical behavior modeling

    Tritchkov, Alexander
    ;
    Stirnimann, J.
    ;
    Gangala, Hareen K
    ;
    Ronse, Kurt  
    Journal article
    1998, Journal of Vacuum Science and Technology B, (12) 6, p.3398-3404

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