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0.18 μm KrF lithography using optical proximity correction based on empirical behavior modeling
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Acq. date: 2025-10-23
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Acq. date: 2025-10-23
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5 since deposited on 2021-10-01
Acq. date: 2025-10-23
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2300 since deposited on 2021-10-01
Acq. date: 2025-10-23
Citations