Browsing by Author "Stivers, Alan"
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Publication Compensation of overlay errors due to mask bending and non-flatness for EUV masks
;Chandhok, Manish ;Goyal, Sanjay ;Carson, Steve ;Park, Seh-Jin ;Zhang, GuojingMyers, AlanProceedings paper2009, Alternative Lithographic Technologies, 22/02/2009, p.72710G