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Browsing by Author "Stivers, Alan"

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    Compensation of overlay errors due to mask bending and non-flatness for EUV masks

    Chandhok, Manish
    ;
    Goyal, Sanjay
    ;
    Carson, Steve
    ;
    Park, Seh-Jin
    ;
    Zhang, Guojing
    ;
    Myers, Alan
    Proceedings paper
    2009, Alternative Lithographic Technologies, 22/02/2009, p.72710G

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