Publication:

Compensation of overlay errors due to mask bending and non-flatness for EUV masks

Date

2009
Proceedings Paper
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Author(s)

Chandhok, Manish
;
Goyal, Sanjay
;
Carson, Steve
;
Park, Seh-Jin
;
Zhang, Guojing
;
Myers, Alan
;
Leeson, Michael
;
Kamna, Marilyn
;
Martinez, Fabian
;
Stivers, Alan
;
Lorusso, Gian  
;
Hermans, Jan  
;
Hendrickx, Eric  
;
Govindjee, Sanjay
;
Brandstetter, Gerd
;
Laursen, Tod

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