Browsing by Author "Stock, Hans-Juergen"
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Publication Source-mask optimization incorporating a physical resist model and manufacturability constraints
;Mulders, Thomas ;Domnenko, Vitaliy ;Kuechler, Bernd ;Stock, Hans-JuergenKlostermann, UlrichProceedings paper2012, Optical Microlithography XXV, 12/02/2012, p.83260G