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Browsing by Author "Stollenwerk, Jochen"

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    Characterization of pellicle membranes by lab-based spectroscopic reflectance and transmittance measurements in the extreme ultraviolet

    Bahrenberg, Lukas
    ;
    Danylyuk, Serhiy
    ;
    Brose, Sascha
    ;
    Pollentier, Ivan  
    ;
    Timmermans, Marina  
    Proceedings paper
    2017, International Conference on Extreme Ultraviolet Lithography, 11/09/2017, p.104501L

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