Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Stowers, Jason K"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Compact 2D OPC modeling of a metal oxide EUV resist for a 7nm node BEOL layer

    De Simone, Danilo  
    ;
    Lyons, Adam
    ;
    Rio, David  
    ;
    Lee, Sook
    ;
    Delorme, Maxence
    ;
    Fumar-Pici, Anita
    Proceedings paper
    2017, Extreme Ultraviolet (EUV) Lithography VIII, 26/02/2017, p.101431E

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings