Browsing by Author "Strössner, Ulrich"
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Publication Increasing the predictability of AIMS measurements by coupling to resist simulations
;Meliorisz, Balint ;Erdmann, Andreas ;Schnattinger, Thomas ;Strössner, UlrichScherübl, ThomasProceedings paper2008, Photomask and Next-Generation Lithography Mask Technology XV, 16/04/2008, p.70282S