Browsing by Author "Strubbe, K."
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Publication Copper plating on resistive substrates, diffusion barrier and alternative seed layers
Proceedings paper2010, Semiconductors, Metal Oxides, and Composites: Metallization and Electrodeposition of Thin Films and Nanostructures, 4/10/2009, p.175-184Publication Electrochemical study of copper depostion on silicon surfaces in HF solutions
Proceedings paper1999, Electrochemical Processing in ULSI Fabrication and Semiconductor/Metal Deposition II, 3/05/1999, p.156-159Publication The reduction of hydrogen peroxide at silicon surfaces in HF solutions
Meeting abstract1999, Electrochemical Society Fall Meeting: 6th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing, 17/10/1999, p.1082