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Electrochemical study of copper depostion on silicon surfaces in HF solutions
Publication:
Electrochemical study of copper depostion on silicon surfaces in HF solutions
Date
1999
Proceedings Paper
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3845.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Teerlinck, Ivo
;
Gomes, W. P.
;
Strubbe, K.
;
Mertens, Paul
;
Heyns, Marc
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1847
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1847
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations