Browsing by Author "Su, P.D."
Now showing 1 - 1 of 1
- Results Per Page
- Sort Options
Publication Copper through silicon via induced keep out zone for 10nm node bulk FinFET CMOS technology
; ;Moroz, Victor; ;Choi, M.; ;Smith, L.Proceedings paper2013, International Electron Devices Meeting - IEDM, 9/12/2013, p.340-343