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Browsing by Author "Su, P.D."

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    Publication

    Copper through silicon via induced keep out zone for 10nm node bulk FinFET CMOS technology

    Guo, Wei  
    ;
    Moroz, Victor
    ;
    Van der Plas, Geert  
    ;
    Choi, M.
    ;
    Redolfi, Augusto  
    ;
    Smith, L.
    ;
    Eneman, Geert  
    Proceedings paper
    2013, International Electron Devices Meeting - IEDM, 9/12/2013, p.340-343

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