Publication:

Copper through silicon via induced keep out zone for 10nm node bulk FinFET CMOS technology

Date

2013
Proceedings Paper
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Author(s)

Guo, Wei  
;
Moroz, Victor
;
Van der Plas, Geert  
;
Choi, M.
;
Redolfi, Augusto  
;
Smith, L.
;
Eneman, Geert  
;
Van Huylenbroeck, Stefaan  
;
Su, P.D.
;
Ivankovic, Andrej
;
De Wachter, Bart  
;
Debusschere, Ingrid  
;
Croes, Kris
;
De Wolf, Ingrid  
;
Mercha, Abdelkarim  
;
Beyer, Gerald  
;
Swinnen, Bart  
;
Beyne, Eric  

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