Browsing by Author "Suehle, J."

Now showing 1 - 2 of 2

Combinatorial methodology for the exploration of metal gate electrodes on HfO2 for the advanced gate stack

Chang, K.S.
;
Green, M.L.
;
Suehle, J.
;
Hattrick-Simpers, J.
;
Takeuchi, I.
;
Ohmori, K.
;
Chikyow, T.
Meeting abstract
2008, 213th ECS Meeting, 18/05/2008, p.712
Combinatorial methodology for the exploration of metal gate electrodes on HfO2 for the advanced gate stack

Chang, Kao-Shuo
;
Green, M.L.
;
Suehle, J.
;
Hattrick-Simpers, J.
;
Takeuchi, I.
;
Ohmori, K.
;
Chikyow, T.
Proceedings paper
2008, Dielectrics for Nanosystems 3: Materials Science, Processing, Reliability, and Manufacturing, 18/05/2008, p.151-159