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Combinatorial methodology for the exploration of metal gate electrodes on HfO2 for the advanced gate stack

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1837 since deposited on 2021-10-17
2last month
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Acq. date: 2026-03-19

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1837 since deposited on 2021-10-17
2last month
1last week
Acq. date: 2026-03-19

Citations