Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Sugawara, Mino"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Pattern fidelity verification for logic design in EUV lithography

    Sugawara, Mino
    ;
    Hendrickx, Eric  
    ;
    Philipsen, Vicky  
    ;
    Maloney, Chris
    ;
    Fenger, Germain
    Proceedings paper
    2014, Extreme Ultraviolet (EUV) Llithography V, 23/02/2014, p.90480V

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings