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Browsing by Author "Sugie, Masaki"

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    e-beam Metrology for High-NA: Revisiting the imec Protocol

    Lorusso, Gian Francesco
    ;
    Moussa, Alain  
    ;
    Habashieh, Sahel  
    ;
    Van Den Heuvel, Dieter  
    Proceedings paper
    2025, 2025 Conference on Metrology Inspection and Process Control-Annual, 2025-02-24, p.134260L-1-134260L-13

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