Publication:

e-beam Metrology for High-NA: Revisiting the imec Protocol

Date

2025

Proceedings Paper

https://doi.org/10.1117/12.3052366

Simple item page Full metadata Statistics

Author(s)

Lorusso, Gian Francesco

;

;

Habashieh, Sahel

;

Van Den Heuvel, Dieter

;

Vangoidsenhoven, Diziana

;

;

;

;

De Simone, Danilo

;

;

;

;

Foubert, Philippe

;

;

Charley, Anne-Laure

Journal

Proceedings of SPIE

Statistics

59 since deposited on 2025-07-28

6last month

Acq. date: 2026-04-27