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Browsing by Author "Sugiyama, Akiyuki"

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    High-precision contouring from SEM image in 32-nm lithography and beyond

    Shindo, Hiroyuki
    ;
    Sugiyama, Akiyuki
    ;
    Komuro, Hitoshi
    ;
    Hojyo, Yutaka
    ;
    Matsuoka, Ryoichi
    Proceedings paper
    2009, Design for Manufacturability through Design-Process Integration III, 22/02/2009, p.72751F

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