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Browsing by Author "Sulzbach, T."

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    Characterization of conductive probes for atomic force microscopy

    Trenkler, Thomas
    ;
    Hantschel, Thomas  
    ;
    Vandervorst, Wilfried  
    ;
    Hellemans, L.
    ;
    Kulisch, W.
    Proceedings paper
    1999, Design, Test, and Microfabrication of MEMS and MOEMS; 30 March - 1 April 1999; Paris, France., 30/03/1999, p.1168-1179
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    Evaluating probes for "electrical" atomic force microscopy

    Trenkler, Thomas
    ;
    Hantschel, Thomas  
    ;
    Stephenson, Robert
    ;
    De Wolf, Peter
    ;
    Hellemans, L.
    Proceedings paper
    1999, Proceedings 5th International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Se, 28/03/1999, p.423-436
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    Evaluating probes for "electrical" atomic force microscopy

    Trenkler, Thomas
    ;
    Hantschel, Thomas  
    ;
    Stephenson, Robert
    ;
    De Wolf, Peter
    ;
    Vandervorst, Wilfried  
    Journal article
    2000, J. Vacuum Science and Technology B, (B18) 1, p.418-427

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