Browsing by Author "Sun, W."
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Publication Defect inspection methodology for Contact Holes
Proceedings paper2024, Conference on Metrology, Inspection, and Process Control XXXVIII, 2024-02-28, p.129551FPublication Detection of crystalline defects in Si/SiGe superlattices towards 3D-DRAM applications
Proceedings paper2024, Conference on Metrology, Inspection, and Process Control XXXVIII, 2024-02-28, p.129551F