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Browsing by Author "Sundarrajan, Arvind"

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    Metallization of sub- 30 nm Interconnects: Comparison of different liner/seed combinations

    Carbonell, Laure
    ;
    Volders, Henny  
    ;
    Heylen, Nancy  
    ;
    Kellens, Kristof  
    ;
    Caluwaerts, Rudy  
    Proceedings paper
    2009, Proceedings of the IEEE International Interconnect Technology Conference, 1/06/2009, p.200-202

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