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Browsing by Author "Sutcliffe, V."

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    Precursor penetration and sealing of porous CVD SiCOH low k dielectric for atomic layer deposition of WCxNy

    Abell, Thomas
    ;
    Shamiryan, Denis
    ;
    Schuhmacher, Jörg
    ;
    Besling, W.
    ;
    Sutcliffe, V.
    ;
    Maex, Karen  
    Proceedings paper
    2003, Proceedings of the Advanced Metallization Conference 2002, 1/10/2002, p.717-723

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