Browsing by Author "Sutcliffe, Vic"
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Publication Characterization of atomic layer deposited nanoscale structure on dense dielectric substrates by X-ray reflectivity
;Travaly, Youssef ;Schuhmacher, J. ;Martin Hoyas, Ana ;Abell, T. ;Sutcliffe, VicJonas, M.Journal article2005, Microelectronic Engineering, (82) 3_4, p.639-644