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Browsing by Author "Swaminathan, Karthik"

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    Evaluating SiGe-on-Si epitaxial quality by inline surface light scattering: a case study on the impact of interfacial oxygen

    Wostyn, Kurt  
    ;
    Kenis, Karine  
    ;
    Rondas, Dirk  
    ;
    Loo, Roger  
    ;
    Hikavyy, Andriy  
    ;
    Douhard, Bastien  
    Proceedings paper
    2014, SiGe, Ge, and Related Compounds 6: Materials, Processing, and Devices, 5/10/2014, p.989-995

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