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Browsing by Author "Sygellou, L"

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    A comparative X-ray photoelectron spectroscopy and medium-energy ion-scattering study of ultra-thin, Hf-based high-k films

    Sygellou, L
    ;
    Ladas, S
    ;
    Reading, M.A.
    ;
    van den Berg, J.A.
    ;
    Conard, Thierry  
    ;
    De Gendt, Stefan  
    Journal article
    2010-03, Surface and Interface Analysis, (2010) 42, p.1057-1060

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