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Browsing by Author "Szafranek, Bartholomaeus"

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    EUV mask defect inspection for the 3nm technology node

    Hermans, Yannick  
    ;
    Heil, Tilmann
    ;
    Capelli, Renzo
    ;
    Szafranek, Bartholomaeus
    ;
    Rhinow, Daniel
    Proceedings paper
    2023, 38th European Mask and Lithography Conference (EMLC 2023), 17/06/2023, p.Art. 128020H

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