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Browsing by Author "Takahashi, S."

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    Line profile measurement of advanced-FinFET features by reference metrology

    Takamasu, Kiyoshi
    ;
    Iwaki, Y.
    ;
    Takahashi, S.
    ;
    Kawada, H.
    ;
    Ikota, M.
    ;
    Yamaguchu, A.
    ;
    Lorusso, Gian  
    Proceedings paper
    2015, Metrology, Inspection, and Process Control for Microlithography XXIX, 22/02/2015, p.942406

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