Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Takamura, N."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Optimization of low-k UV curing: effect of wavelength on critical properties of the dielectric

    Aksenov, German
    ;
    De Roest, David  
    ;
    Verdonck, Patrick  
    ;
    Dultsev, F.N.
    ;
    Marsik, Prema
    Proceedings paper
    2009, Materials, Processes and Reliability for Advanced Interconnects for Micro- and Nanoelectronics, 14/04/2009, p.1156-D02-08

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings