Browsing by Author "Takeuchi, I."

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Combinatorial methodology for the exploration of metal gate electrodes on HfO2 for the advanced gate stack

Chang, K.S.
;
Green, M.L.
;
Suehle, J.
;
Hattrick-Simpers, J.
;
Takeuchi, I.
;
Ohmori, K.
;
Chikyow, T.
Meeting abstract
2008, 213th ECS Meeting, 18/05/2008, p.712
Combinatorial methodology for the exploration of metal gate electrodes on HfO2 for the advanced gate stack

Chang, Kao-Shuo
;
Green, M.L.
;
Suehle, J.
;
Hattrick-Simpers, J.
;
Takeuchi, I.
;
Ohmori, K.
;
Chikyow, T.
Proceedings paper
2008, Dielectrics for Nanosystems 3: Materials Science, Processing, Reliability, and Manufacturing, 18/05/2008, p.151-159
Physical and chemical characterization of combinatorial metal gate electrode Ta–C–N library film

Chang, K.S.
;
Green, M.L.
;
Levin, I.
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Hattrick-Simpers, J.R.
;
Jaye, C.
;
Fischer, D.A.
;
Takeuchi, I.
Journal article
2010, Applied Physics Letters, (96) 19, p.192114