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Browsing by Author "Talanov, Vladimir"

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    Evaluation of plasma damage in patterned low-k structures by near-field scanning probe microwave microscope: effect of plasma ash chemistry

    Urbanowicz, Adam
    ;
    Talanov, Vladimir
    ;
    Pantouvaki, Marianna  
    ;
    Struyf, Herbert  
    ;
    De Gendt, Stefan  
    Proceedings paper
    2009, IEEE International Interconnect Technology Conference - IITC, 1/06/2009, p.134-136

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