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Evaluation of plasma damage in patterned low-k structures by near-field scanning probe microwave microscope: effect of plasma ash chemistry
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1864 since deposited on 2021-10-18
1last month
Acq. date: 2026-01-11
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Views
1864 since deposited on 2021-10-18
1last month
Acq. date: 2026-01-11
Citations