Browsing by Author "Tamir, Magi"
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Publication Elucidating advanced inhibitor material in copper CMP: K-sorbate as a passivator
;Tamir, Magi ;Vaes, JanEin Eli, YairProceedings paper2008, 13th International CMP Planarization for ULSI Multilevel Interconnection Conference - CMP-MIC, 3/03/2008