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Elucidating advanced inhibitor material in copper CMP: K-sorbate as a passivator
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Elucidating advanced inhibitor material in copper CMP: K-sorbate as a passivator
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Date
2008
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Tamir, Magi
;
Vaes, Jan
;
Ein Eli, Yair
Journal
Abstract
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1897
since deposited on 2021-10-17
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last month
Acq. date: 2026-01-10
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Metrics
Views
1897
since deposited on 2021-10-17
2
last month
Acq. date: 2026-01-10
Citations