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Elucidating advanced inhibitor material in copper CMP: K-sorbate as a passivator
Publication:
Elucidating advanced inhibitor material in copper CMP: K-sorbate as a passivator
Date
2008
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Tamir, Magi
;
Vaes, Jan
;
Ein Eli, Yair
Journal
Abstract
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1893
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
1893
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations