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Browsing by Author "Tanaka, Takayoshi"

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    SiGe selective etching to enable bottom and middle dielectric isolations for advanced gate-all-around FET architecture

    Kawarazaki, Hikaru
    ;
    Nakano, Teppei
    ;
    Ishizu, Takaaki
    ;
    Tanaka, Takayoshi
    ;
    Liu, Wen
    ;
    Chen, Jason
    Proceedings paper
    2023-08-14, UCPSS - 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, 11-13 Sept 2023, p.23-27

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