Browsing by Author "Tanaka, Takayoshi"
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Publication SiGe selective etching to enable bottom and middle dielectric isolations for advanced gate-all-around FET architecture
;Kawarazaki, Hikaru ;Nakano, Teppei ;Ishizu, Takaaki ;Tanaka, Takayoshi ;Liu, WenChen, JasonProceedings paper2023-08-14, UCPSS - 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, 11-13 Sept 2023, p.23-27