Browsing by Author "Tanaka, Yoichi"
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Publication Functional water solutions to enable advanced wet cleaning process for next generation semiconductor device manufacturing
Meeting abstract2021, Ultrapure Micro 2021 Annual Conference, 3-5 November 2021Publication Study on Alternative Dipole Material Wet Clean by pH Controlled Functional Water
Proceedings paper2023-08, UCPSS - 16th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, September 2023, p.69-73Publication Wet-chemical Cu Cleaning for Fine-Pitch Hybrid Bonding
Proceedings paper2025, IEEE 75th Electronic Components and Technology Conference (ECTC), 2025-05-27, p.1859-1863