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Browsing by Author "Tang, W."

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    Effective work function engineering for aggressively scaled planar and FinFET-based devices with high-k last replacement metal gate technology

    Veloso, Anabela  
    ;
    Chew, Soon Aik
    ;
    Higuchi, Yuichi
    ;
    Ragnarsson, Lars-Ake  
    ;
    Simoen, Eddy  
    ;
    Schram, Tom  
    Proceedings paper
    2012-09, International Conference on Solid State Devices and Materials - SSDM, 25/09/2012
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    Effective work function engineering for aggressively scaled planar and multi-gate fin field-effect transistor-based devices with high-k last replacement metal gate technology

    Veloso, Anabela  
    ;
    Chew, Soon Aik
    ;
    Higuchi, Yuichi
    ;
    Ragnarsson, Lars-Ake  
    ;
    Simoen, Eddy  
    ;
    Schram, Tom  
    Journal article
    2013, Japanese Journal of Applied Physics, (52) 4, p.04CA02

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