Browsing by Author "Tarnowka, Alexandre"
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Publication Cu/Low-k thickness measurement for advanced Cu CMP process development and control
Proceedings paper2009-03, International Semiconductor Technology Conference - ISTC/CSTIC, 19/03/2009, p.453-458Publication Optical metrology based post Cu CMP metal residue detection and characterization
Proceedings paper2009, International Conference on Planarization/CMP Technology - ICPT, 19/11/2009