Browsing by Author "Tarutani, Shinji"
Now showing 1 - 2 of 2
- Results Per Page
- Sort Options
Publication Advances in dual-tone development for pitch frequency doubling
Proceedings paper2010, Optical Microlithography XXIII, 21/02/2010, p.76400EPublication Comparing positive and negative tone development process for printing the metal and contact layers of the 32- and 22-nm node
Journal article2010-12, Journal of Micro/Nanolithography MEMS and MOEMS, (9) 4, p.43007